Fluent Inc.
Announces CFD Software for Plasma Modeling
Fluent Teams with Kinema Research & Software to Deliver Joint Product for Semiconductor Applications
Lebanon,
NH/Monument, CO – July 10, 2000 - Fluent Inc., the leading provider of
Computational Fluid Dynamics (CFD) simulation software and services, and Kinema
Research & Software, a technology leader in the field of plasma modeling,
announce that they will develop a joint software product for the semiconductor
industry. The new product, a computer aided engineering (CAE) tool for plasma
simulation, links Fluent's FLUENT™ CFD package with Kinema's PLASMATOR®
software, supporting users with best-in-class CFD software for design and
analysis of plasma-related applications.
Chemically-reacting
plasma discharges are an indispensable part of modern integrated circuit
fabrication technology. The new, jointly-developed product will allow engineers
to gain insight into equipment and process design, improve performance, and
reduce development time and expense. This new product will add powerful design
and analysis capabilities for applications including plasma-enhanced chemical
vapor deposition (PECVD), dielectric and metal etching, ion implantation, and
reactor cleaning. Current plans are to include models for inductively (ICP) and
capacitively (CCP) driven plasma discharges. The new product will leverage
Kinema's comprehensive plasma chemistry database by including chemistry models
for key applications.
Under
the terms of the alliance, Fluent will provide resources for product sales,
marketing, and technical support, and the two companies will collaborate on
ongoing product development. The joint FLUENT/ PLASMATOR product will appear as
a future release from Fluent.
A Market-Driven Alliance
The
marketplace has reacted positively to the joint effort; "We are very
pleased to see Fluent and Kinema joining forces. The coupling of these two
products is important because it combines the CFD expertise of FLUENT with the
comprehensive plasma physics models of PLASMATOR," said Larry Gochberg,
Manager of Computational Modeling and Reliability at Novellus Systems, Inc.,
San Jose, CA.
"The
integration of these two tools will aid in improving the accuracy and
efficiency of our plasma CVD modeling work," Gochberg concluded.
According
to Barbara Hutchings, Fluent's Director of Strategic Partnerships, "Fluent
expects to broaden our markets from our collaboration. Kinema's deep
application expertise and involvement with the semiconductor industry are a strategic
asset to Fluent and will help us focus our products on the key needs of this
group. Technologically, the joint product development efforts will offer a
depth of features not available elsewhere. In particular, Kinema's plasma
chemistry models, including collision cross-sections, attachment,
recombination, ionization and dissociation reactions, will contribute to highly
accurate CFD predictions."
Dr.
Lowell Morgan of Kinema notes, "The collaboration with Fluent allows
Kinema to reach a large audience that can benefit from the modeling expertise
we have developed for plasma applications in the semiconductor industry. Plasma
modeling represents a wide range of technical challenges and we look forward to
working with Fluent, and Fluent's clients, to provide new solutions,"
Morgan concludes.
See It First at SEMICON
Additional
details about the FLUENT/PLASMATOR product will be available during SEMICON
West 2000, the world's largest trade show for the semiconductor industry, July
10-12, Booth 5151, San Francisco, California. Two applications will be
highlighted:
·
ICP
discharge in the GEC cell for the argon-oxygen-silane dielectric deposition
process, and
·
CCP
discharge using He-NF3 chemistry for etching surfaces in the GEC
cell.
About Fluent
Fluent
Inc. is a world leader in the rapidly growing field of computerized design and
simulation software. Fluent's software is used to predict fluid flow, heat and
mass transfer, chemical reaction, and related phenomena. Fluent's software
products and services help engineers in leading corporations world-wide with
detailed product development, design optimization, trouble shooting, scale-up
and retrofitting. Fluent's software significantly reduces engineering cost,
while improving the final design of products in applications ranging from
design of electronic components and systems to automotive engineering, and from
combustion system design to process plant troubleshooting.
Fluent's
corporate headquarters are located in Lebanon, New Hampshire, USA. Fluent's
European headquarters are located in Sheffield, England, with local offices in
France, Germany, and Italy. Fluent's CFD software is also available around the
world through joint ventures, partnerships, and distributors in Japan, Korea,
Australia, the Czech Republic, and most European countries.
Fluent
is a subsidiary of Aavid Thermal Technologies Inc. Additional information on
Fluent's products can be obtained on the World Wide Web at http://www.fluent.com
or by e-mailing info@fluent.com. More
information on Aavid Thermal Technologies is available at http://www.aavid.com.
About Kinema
Kinema
Research & Software was founded in 1989 by Dr. Lowell Morgan. Kinema
has
more than a century of combined experience in physics. Kinema performs contract
research in plasma chemistry modeling, atomic and molecular physics, and data
services as well as writes and markets computer software for modeling and
simulation of partially ionized plasmas. Kinema's corporate headquarters are
located in Monument, Colorado, USA. Additional information on Kinema and its
products can be obtained on the World Wide Web at http://www.kinema.com.
Graphics Available
Graphic
images and accompanying captions to support this release can be found on the
web at http:/www.fluent.com/about/news/pr/index.htm
by following the links to this release. Fluent Inc. grants permission for use
of these graphics and their captions in conjunction with any or all of this
press release.
