Kinema Research & Software

Plasma Chemistry Models Available For PLASMATOR

                                   

                                        

We have developed a number of plasma chemistry models for use with PLASMATOR. The list of individual molecules is shown below. We can construct models for mixtures of feed gases. The models consist of a minimum of

  • electron impact processes
  • ion-molecule reactions
  • ion-ion reactions

The electron impact cross section sets have been developed from measured, and calculated (ab initio) cross sections, and transport coefficient data (swarm analysis)

The atoms and molecules for which we have plasma chemistry models are:

c-C4F8 SiH4 HBr Ar
C2F6 SiF4 Cl2 He
C4F6 SiCl4 F2 Humid Air
CF4 SF6 N2
CHF3 BCl3 O2
C2F4 BF3 H2
C2H4 NF3 N2O

 

 
   

 

 

Copyright © 2002 Kinema Research & Software, L.L.C.

Last modified: January 22, 2004