PPT Slide

CODE VALIDATION: PLASMATOR is a Mature, Robust, and Accurate Plasma Simulation Code

GEC Reference Cell C4F8 ICP Discharge*

200 W, 15 mTorr

350 W, 15 mTorr

350 W, 25 mTorr

* Measurements courtesy of Karla Waters & Harold Anderson at the University of New Mexico

CF CF2 Ne

CF CF2 Ne

CF CF2 Ne

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